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半导体设备电子维修大全

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本文来源于东莞全芯官方网站,是该公司针对半导体设备电子维修的统计清单,都是来源于实际维修案例,以后需要什么型号的射频电源型号可以直接在这里找了,并且还在不断的更新当中,可以电话联系13790663326管工


AE(RFPP)











AM5AM10AM20AM25


AM30AM50AMNPAMNHS


Apex1513Apex3013Apex3k2pinApex5513


Apex10013Ascent 40k&60kAstral 20kATL 100


ATLAS 1513/2012ATX600ATX CPAZX 10


AZX 63AZX 72AZX 90 AZX Dome


Cesar 133Cesar 136Cesar 1310Cesar 1312


Cesar 1320Cesar 1325Cesar 1330Cesar 1350


Cesar 0210Cesar 2710Cesar 2720Cesar 405


Cesar 4020Cesar 4040Cesar 6020Cesar 6020


E-WaveFTMS 2kGenCalHFV 3k


HFV 5kHFV 8kICP10/20ID 2500/3500


ID 3501IDX IILF-5LF10


LF20LF30LFGS 1250Litmas 1501/3001


LM 5KLM 10KLR 853MDL II 10K


MDL II 15KMDX 500MDX 500 DUALMDX 1K/1.5K


MDX 2.5KMDX 208 5KMDX208 10KMDX308 10K


MDX 15KMDX 20KMDX 25KMDX 30K


MDX 35KMDX 40KMDX 50KMDX 60K


MDX II 15KMDX II 30KMDX-L 6KMDX-L 12K


MDX-L 15KMDX-L 18KMercury 1KMercury 3K


Mercury 10KMSD 350Navigator 1013-L35Navigator 2060


Navigator 3013Navigator 3013-ICPNavigator 4040Navigator 5060/5002


Navigator 5513Navigator 5513-L80Navigator 10013Ovation 2560


Ovation 2760Paramount 3kPDP 2500PDX 500


PDX 900PDX 1250PDX 1400PDX 2500


PDX 5000PDX 8000PDX II 2K & 3KPDW 2200


PE 1KPE 2.5KPE 3.75KPE 5K


PE 10KPE II 5KPE II 10KPinnacle 3000


Pinnacle I 6/6KPinnacle I 6-8KPinnacle I 12-15KPinnacle II 6K


Pinnacle II /6/6KPinnacle II 10KPinnacle II 10/10KPinnacle II 12K


Pinnacle II 20KPinnacle Plus+ 5KPinnacle Plus+ 5/5KPinnacle Plus+ 10K


Pinnacle Diamond 8KPinnacle Diamond 10KPinnacle Diamond 15KPulsar 40K


Pulsar 80KRapid FRapid OERF 5


RF10RF20RF25RF30


RF35RF50RFDS 1250RFDS 1251


RFDS 2K2VRFG 2K2VRFG 3000RFG 3001


RFG 3002RFG 5500RFX 600RFX 600A


RFX II 1250RFX II 3000RFX II 5500Sparc VS


Sparc-le 20KSparc-le 30KSparc-le IISparc-le V


STARBURSTSUMMIT 50K UNITSUMMIT 50K ModuleVario Match 600


Vario Match 700Vario Match 1000Vario Match 1200Vario Match 1500


Vario Match 3000Vario Match 5000VHF 2060Xstream


Z-scan











ADTEC











AX-500   seriesAX-1000 seriesAX-2000 seriesAX-3000 series


TX03 seriesTX06 seriesTX06 seriesTX20 series


TX30 seriesTS05 seriesTS10 seriesTS20 series


TS30 seriesAMV1000-G5E seriesAMV1000-MATAMVG series


AM-1000 seriesAM-2000 seriesAW-3000AW-8000II


AMV-1000ASM-27MAMV-3000SMAMV-1000G5C series









Trazar











AMU2-1AMU2C-1AMU10D-1AMU10D-2AMU10E-2AMU10G-2RDFS-1
SRN1-2











MKS<ENI&ASTEX>











OEM-6   seriesOEM-650 seriesOEM-12 seriesOEM-1250


OEM-2000OEM-25 seriesOEM-28 seriesOEM-50 series


PL-2HF seriesPL-3GGMW-25AGMW-50A


LPG-1ATLPG-12AACG-6BACG-10T


MWD-25LD/55LDMHW-25-04MWH-25-04MWM-25-02X


NOVA-50AACG10 1出力DPG10 2出力DCG-100Z/200Z/400Z series


GHW-12ZGHW-25MAGNETRON HEADDC22M


DPGS-10DPGD-10ONE BOX OB2(2MHz)ONE BOX OB2(27MHz)


SXRHC/Smart MatchASTRON RPSC 2L/3L/6L/8L/15L/22L/30L




X-2115/2530/2630/7651/7685/7690PSK-04/8200/8560-7100/8560-3020/8555/9670





FI20160-1/20160-3/20045/20606/20606-1/20634/20162-1





MKS Baratron   622/623/625/626/627/628/629/722/750/751/E28B/E29B











COMDEL











CPS-100/13CPS-1000/13CPS-1000M/13CPS-1001/13CPS-1001S/13CPS-1001/60
CPS-1001S/60CX-600CX-600SCX-600S/13CLF-5000CLX-2500
CLX-1250SFP1543RACB seriesCX seriesCDX seriesCXH series
FR2241R3











京三(KYOSAN)





RFK150 SERIES





RFK-20   SeriesRFK-30 SeriesRFK-50 SeriesRFK-75 Series


RFK-100 SeriesDFK45Z










DAIHEN











DRFS-5SADRFS-5SAR2DRFS-10SBMFG-15SAMFG-20SAMFG-20SA1MFG-20SA3
AMN-30C11RMN-30D2RMN-50BRMN-75ARMN-75A1







PEARL











LP-500-800KLP-2000-800KRP-150-2MRP-300-2MRP-300-1356RP-3000-27M






AMAT   MATCH











0010-21748 PVD   RF Match”300mm METAL ENDURA”0010-13878 PVD RF Match” METAL “




0010-02977 PVD RF Match”   METAL “0010-15877 PVD RF Match” METAL “




0010-01929 PVD RF Match”   METAL “0010-13627 PVD RF Match” METAL “




0010-22161 PVD RF Match”   METAL “0010-02979 PVD RF Match” METAL “




0010-15878 PVD RF Match”   METAL “0010-30236 PVD RF Match” METAL “




0010-02372 PVD RF   Match”300mm METAL ENDURA”0010-26180 PVD RF Match”300mm METAL   ENDURA”




0010-33724 PVD RF Match”   METAL “0010-30686K High RF Match ECTH,MXP+”DRY”




0010-30686R High RF Match   ECTH,MXP+”DRY”0010-09750 RF Match Box,CVD”P-5000 CVD”




0010-09417 RF Match   Box,CVD”200mm CVD”0010-04138 RF Match Box,MCVD”CVD”




0010-20525 RF Match   Box,PVD”150mm METAL”0010-20524 RF Match Box,PVD”200mm METAL”




0010-30094 RF Match   Box,W/PEAK DETECTO” METAL “0010-36162 RF Match Box,SIMPLE CATHODE”   METAL “




0010-09416 RF Match   Box,ETCH”200mm DRY”0010-00854 RF Match Box,DPS”200mm   CENTURA DPS”




0010-36114 RF Match   Box,DPS”200mm CENTURA DPS”0010-26408 RF Match Box,DPS”200mm   CENTURA DPS”




0010-20855 RF Match   Box,DPS”200mm CENTURA DPS”0010-26029 PVD Fixed Match”300mm METAL   ENDURA”




0010-23684 Top Match”300mm   CVD ULTIMA”0010-23685 Side Match”300mm CVD ULTIMA”




FR2241R3 LF Match Box   <COMDEL>”300mm METAL ENDURA1110-01043 Dome Match”200mm DRY”




1110-01046 Dome Match”200mm   DRY”0190-01371 HDP Bias Match




0190-13025 AE RPSC RAPID











Brooks   Automation











MagnaTron   7 (MAG7)MTR5ATR8Brooks(旧TRI)ABM405-1-NOZ


MagnaTron 6 (MAG6)MagnaTron 8 (MAG8)ATR7VTR5








PRI











ATM-1×4/105/107/204/205/207/305/405/407DBM-2405/2406/2407/2506/2507/2607




WTM-107/407/511TSB-2407PRE-200 SeriesESC-100/200


4520RVCE











Genmark











GB3/4/4E/4S/4P/4PS/5/7/7S/7Y/8/8YGENCOBOT










RORZE











RR304/700/701/811/713/721











MECS











ASYST   UTC-100/100A/100HG/800/820ASYST UTL-80/100ASYST UTV-400/2500ASYST UTW-2000/3000


ASYST UTX-1100/1200ASYST OF-100A/250/OFH-3000ASYST OFH-100/3000ASYST CS-100/1000


ASYST 300FLASYST ISOPORTASYST LPTASYST YA-400








Kensington











WH3C/4C/4DWFH3C/H4DMilti-Link Module









Aera   & SAM











AFC-780CHT×   FC-260Aera FC-7810CD× FC-261Aera FC-7810CD× FC-262Aera FC-D980C× LX-1200C


Aera FC-2902-MEPT-T× FC-770   SeriesAera FCPA-PA7850CTBH× FC-771 SeriesAera 5Ra FC-D980C× FC-772 SeriesAera FC-2902MEP5-4V× FC-773 Series


FC-780 SeriesFC-781 SeriesFC-782 SeriesFC-785 Series


FC-786 SeriesFC-980 SeriesFC-981 SeriesFC-982 Series


FC-985 SeriesFC-986 SeriesFC-7700 SeriesFC-7710 Series


FC-7800 SeriesFC-7810 SeriesFC-7850 SeriesFC-7860 Series


FC-D980 SeriesFC-D981 SeriesFC-D982 SeriesFC-D985 Series


FC-D986 SeriesFC-R7700 SeriesFC-R7710 SeriesFC-R7800 Series


FC-R7810 SeriesFC-PA773 SeriesFC-PAR7810 SeriesFC-PAR7820 Series


FC-PAR7850 SeriesFC-PAR7860 SeriesFC-DR980 SeriesFC-DR981 Series


FC-PA7810 Series











HORIBA   STEC











SEC-4400MOSEC-7340MO-UCSEC-4400MC-UCSEC-7455MO


SEC-4400MCSEC-4550RCSEC 3030-07663SEC-8460


SEC AMAT 3030-06043SEC-7330MC-UCSEC-7330AMC-302SEC-7455MO-UC


SEC-7330RSEC-Z522KXC-T50SEC-7340MO-UC









Brooks











UFC-1660UFC–1661UFC–1665UFC-7361


UFC-8160UFC-8161UFC-8165UFC-8261


UFC-8561UFC-8565UNIT 3100UNIT3161


UNIT3165FC260FC261FC262


FC280FC280SAFC2900/FC2910 SeriesFC2900M


FC2920/FC2921 SeriesFC2960MFC2979MIFC125C


FM360FM361FM362FM380


FM380SAFM3900FM3910FM3920


FM3921IntelliFlow Ⅱ(IN2)IntelliFlow 3XP/GF50(IN3XP)IntelliFlow 3XP High Flow Rate


TN2900M Series180C73007301


7301C73047304C8100


81018101C81058105C








EBARA











TMP ET   series ”ET300WS,ET450C,ET600WS,ET800WS,ET1600WS”





DRY PUMP 従来機”40×20 ,65×40   ,50×20 ,80×25 ,150×40(D,J) ”





DRY PUMP A series   ”A07V,A10S,A25S,A30W,A70W,A150W, A200W”





DRY PUMP AA series”   AAL10,AA10, AA20, AA30, AA40W, AA70W,AA100W,AA200W”





DRY PUMP AAS   series”AAS10,AAS20,AAS40W,AAS70W,AAS100W,AAS200W”





DRY PUMP ESR series   ”ESR20N,30,30N,80W,80WN,100WN,200W,200WN,300W,300WN,500W,500WN”





DRY PUMP EST series   “EST10N,25N,100WN,200WN,300WN,500WN”











SHIMADZU











TMP-301/303/801/802/803/1001/1002/1003/2003TMP-280L/550L/1000L/1500LTMP-200CM/200LM/202LM/203LM



TMP-303LMC(A1)/403LMTMP-1002LMTMP-1303LMC



TMP-2003LMTMP-3203LM-N1/LMC-K1/LMEC-K1TMP3403LMC-T1/3403LMC



T4/3603LMC-A1











EDWARDS(SEIKO   SEIKI, BOC EDWARDS)











STP-300C/400C





STP-301/603/1003





STP-600C/H600C/1000C/H1000C





STP-600C/H600C/1000C/H1000C





STP-603C/H803C/1003C/H1301C/H1303C





STP-H301C/451C/2000C/2001C/H2001C/H2001K1B/H2002C





STP-A803H/A1303C/A1603C/A2203C/2503C/3003C/3503C





STP-F2203C/XA2603C/XA2703C/XH2603C/XH2703C/3203C/4503C





STP-iXA2206/iXA3306/iXA4506





STP-L301C





QDP-40 /80





iQDP-40 /80





QMB-250 /500 /1200/2600





IH-80/160/600/1000/1800/1800HTX





IHX-100/200H/610/1210/1210H/1210HT/1220H/1220HTX/1820T/1820/1820H/3030TX/3030/3030T





E2M-0.7/-0.8 /1.5 /5 /8 /12   /18 /28 /40 /80 /175 /275





EH-250/500/1200/2600





QMB-250/500/1200/2600





TPU





ATLUS





SPECTRA





ZENIS











LEYBOLD











TMP35/50/70/151/340M/361/450/600TMP1000C/1100CTW250S/701Mag400/900/1200/2000/2010CHT


MagW830/W1300C/W1500CT/W2000/W2010CHTT1600










三菱(MITSUBISHI)











PT150/1500FT1200W/1400WFT2200FT3000W/3300W/3301W








OSAKA











TG050/220F/550TH532TG700M/900M/1000M/1103MTG2000M/2001M/2203M/2300M/2400M








ULVAC











UTM150/500/3301WKEYTRAN










ALCATEL











ATP80/100/150/300/400/900TMP1000C/1100CATP5150/5400/5402CIS




MDP5011ATH400M/1300M/1600M/2300M










Varian











V200A/250/300HT/551/701/1000A/1000HT/1001HT/1000ICE/1800A











Rigaku











RTPG151/300VRC













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